Title :
Thin-film measurements with THz-radiation
Author :
Ellrich, F. ; Theuer, M. ; Torosyan, G. ; Jonuscheit, J. ; Beigang, R.
Author_Institution :
Fraunhofer Inst. for Phys. Meas. Tech. IPM, Kaiserslautern
Abstract :
The potential of short terahertz pulses for thin-film measurements of materials opaque in the visible range is demonstrated. Layer thicknesses down to 10 mum have been determined in transmission as well as in reflection measuring mode and complex multilayer structures in the sub-wavelength range have been resolved with this technique.
Keywords :
multilayers; polymer films; reflection; refractive index; silicon; submillimetre waves; visible spectra; Si; complex multilayer structure; layer thickness; plastic films; reflection measuring mode; refractive index; terahertz pulse radiation; transmission measuring mode; visible range; Electromagnetic measurements; Mechanical variables measurement; Optical reflection; Particle measurements; Pulse measurements; Refractive index; Submillimeter wave measurements; Thickness measurement; Transistors; Ultrasonic variables measurement;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665779
