Title :
Electron beam evaporation of Tungsten Oxide films for gas sensors
Author :
Tesfamichael, T.
Author_Institution :
Sch. of Eng. Syst., Queensland Univ. of Technol., Brisbane, QLD, Australia
Abstract :
Pure and Iron incorporated nanostructured Tungsten Oxide (WO3) thin films were investigated for gas sensing applications using noise spectroscopy. The WO3 sensor was able to detect lower concentrations (1 ppm-10 ppm) of NH3, CO, CH4 and Acetaldehyde gases at higher operating temperatures between 100°C to 250°C. The response of the WO3 sensor to NH3, CH4 and Acetaldehyde at lower temperatures (50°C-100°C) was significant when the sensor was photo-activated using blue-light emitting diode (Blue-LED). The WO3 with Fe (WO3:Fe) was found to show some response to Acetaldehyde gas only at relatively higher operating temperature (250°C) and gas concentration of 10 ppm.
Keywords :
electron beam effects; gas sensors; light emitting diodes; tungsten compounds; vacuum deposition; WO2; blue light emitting diode; electron beam evaporation; gas sensors; noise spectroscopy; temperature 100 degC to 250 degC; temperature 50 degC to 100 degC; tungsten oxide films; Electron beams; Gas detectors; Gases; Grain size; Iron; Surface morphology; Temperature sensors; Thin film sensors; Tungsten; Working environment noise;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398167
