Highly intergrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection

Author

Lu, J. ; Suga, T. ; Zhang, Y. ; Itoh, T. ; Maeda, R. ; Mihara, T.

Author_Institution

Sch. of Eng., Univ. of Tokyo, Tokyo, Japan

fYear

2009

fDate

25-28 Oct. 2009

Firstpage

266

Lastpage

269

Abstract

Highly intergrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (~0.2 V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator´s geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.

Keywords

Q-factor; chemical sensors; impedance matching; microcavities; micromechanical resonators; piezoelectric thin films; PZT; PZT electrode stack; Si; chemicals detection; energy dissipation; human healthcare applications; impedance matching; integrated ultrasensitive silicon disk microresonator; quality factor; resonator integrated piezoelectric PZT thin film; wireless sensor network; Chemicals; Electrodes; Energy dissipation; Geometry; Impedance matching; Low voltage; Piezoelectric films; Q factor; Silicon; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2009 IEEE

Conference_Location

Christchurch

ISSN

1930-0395

Print_ISBN

978-1-4244-4548-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2009.5398170

Filename

5398170