Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

Processes aiming at integrating suspended single-walled carbon nanotubes (SWNTs) into Micro-Electromechanical Systems (MEMS) have to deal explicitly with the fragility of SWNTs. In general, SWNT growth is delayed to the last step of a process so as to avoid any contamination and physical damage, which restricts the flexibility of an integration process. Here, we present a novel integration process involving a sacrificial bridge structure that provides SWNTs with physical support throughout the process. Thus, post-growth wet processes are enabled, and mechanical rupturing is prevented. With this novel approach, clamped-clamped suspended SWNTs with resistances down to 115 kΩ (with 2 μm suspended segment) are integrated into SOI micro-structures.