Title :
Ultrathin flexible nanocomposite membranes as miniature pressure sensors
Author :
Tsukruk, Vladimir V. ; McConney, Michael
Author_Institution :
Sch. of Mater. Sci. & Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Measuring microscopic deflections of membranes caused by small changes in pressure, weight, temperature, or chemical interactions is developing into one of the most versatile sensing approaches. Ultra-thin membranes are emerging as critical elements in various sensing devices, such as acoustic, pressure microdevices, chemical and thermal sensors, all discussed in this paper.
Keywords :
chemical sensors; membranes; nanocomposites; pressure sensors; temperature sensors; acoustic sensors; chemical sensors; microscopic deflections; miniature pressure sensors; pressure microdevices; thermal sensors; ultrathin flexible nanocomposite membranes; ultrathin membranes; Acoustic devices; Acoustic measurements; Acoustic sensors; Biomembranes; Chemical elements; Chemical sensors; Microscopy; Pressure measurement; Temperature sensors; Thermal sensors;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398186
