DocumentCode
3280061
Title
Ultrathin flexible nanocomposite membranes as miniature pressure sensors
Author
Tsukruk, Vladimir V. ; McConney, Michael
Author_Institution
Sch. of Mater. Sci. & Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
948
Lastpage
952
Abstract
Measuring microscopic deflections of membranes caused by small changes in pressure, weight, temperature, or chemical interactions is developing into one of the most versatile sensing approaches. Ultra-thin membranes are emerging as critical elements in various sensing devices, such as acoustic, pressure microdevices, chemical and thermal sensors, all discussed in this paper.
Keywords
chemical sensors; membranes; nanocomposites; pressure sensors; temperature sensors; acoustic sensors; chemical sensors; microscopic deflections; miniature pressure sensors; pressure microdevices; thermal sensors; ultrathin flexible nanocomposite membranes; ultrathin membranes; Acoustic devices; Acoustic measurements; Acoustic sensors; Biomembranes; Chemical elements; Chemical sensors; Microscopy; Pressure measurement; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398186
Filename
5398186
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