Resonant properties of piezoelectric cantilever transducers fabricated on the SiC membrane

Author

Park, Jae Hong ; Choi, Kiyoung ; Lee, Dong-Yeon ; Shim, Jaesool ; Kim, Tae Song

Author_Institution

NEMS-Bio Team, Nat. NanoFab Center, Daejeon, South Korea

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

61

Lastpage

63

Abstract

We fabricated PZT thick film cantilever based on piezoelectric lead zirconate titanate (PZT) using SiC wafer. Electromechanical properties of PZT microcantilever such as nonlinear behavior under high voltage and behavior in liquid were investigated. The decrease in resonant frequency with an increase in electric field could be explained by the increase in elastic compliance of PZT thick film because of the elastic nonlinearity, and microcantilever dimension. Cantilever was tested in liquid using water-glycerol solutions of various proportion compositions. The viscosity and the density of liquids have characterized via oscillating-sphere model. The mass sensitivity through Au mass loading was discussed.

Keywords

cantilevers; lead compounds; micromechanical devices; piezoelectric transducers; silicon compounds; thick film devices; titanium compounds; wide band gap semiconductors; zirconium compounds; PZT; PZT microcantilever; PZT thick film cantilever; SiC; elastic compliance; elastic nonlinearity; electromechanical properties; gold mass loading; mass sensitivity; microcantilever dimension; nonlinear behavior; oscillating-sphere model; piezoelectric cantilever transducers; piezoelectric lead zirconate titanate; resonant frequency; resonant properties; silicon carbide membrane; silicon carbide wafer; water-glycerol solutions; Micromechanical devices; Sensitivity; Sensors; Silicon carbide; Thermal stability; Thick films; MEMS; Piezoelectric; adhesion layer; buffer layer; cantilever; electrode layer; thick film;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017295

Filename

6017295