• DocumentCode
    3280257
  • Title

    A simple model-base prediction method for delamination failures in Low-k/cu interconnects with flip chip packages

  • Author

    Kawahara, Jun ; Kume, Izuru ; Honda, Hiroki ; Kyogoku, Y. ; Ito, Fumihiko ; Hane, M. ; Kata, Keiichirou ; Hayashi, Yasuhiro

  • Author_Institution
    LSI Res. Lab., Kanagawa, Japan
  • fYear
    2013
  • fDate
    13-15 June 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A model-base prediction method is proposed for delamination/cracking failures in Low-k/Cu interconnects with Pb-free FCBGA (Flip Chip-Ball Grid Array). The low-k failure under the solder bump, so called as a white bump (WB) failure, is caused by large thermal stress to a brittle low-k film during the cooling process from high reflow temperature for the Pb-free solder. Based on failure analysis using several low-k films and several packaging materials/structures, we found that occurrence of the WB failure is able to be predicted by a simple evaluation function of the simulated strain energy and a critical energy release rate of crack, which is defined by the fracture toughness and the adhesion-strength of the low-k film. According to this method, we can lead a preliminary design guideline on the bump pitch/structure or the interposer material/structure toward no WE failure quickly.
  • Keywords
    adhesion; ball grid arrays; copper; delamination; failure analysis; flip-chip devices; fracture toughness; integrated circuit interconnections; low-k dielectric thin films; solders; thermal stresses; Cu; Pb-free FCBGA; adhesion-strength; brittle low-k film; cooling process; cracking failures; critical energy release rate; delamination failures; failure analysis; flip chip packages; flip chip-ball grid array; fracture toughness; high reflow temperature; low-k/Cu interconnects; model-base prediction method; solder bump; strain energy; thermal stress; white bump failure; Adhesives; Films; Mathematical model; Predictive models; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Interconnect Technology Conference (IITC), 2013 IEEE International
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4799-0438-9
  • Type

    conf

  • DOI
    10.1109/IITC.2013.6615560
  • Filename
    6615560