Title :
Sensitivity improvement of MEMS-based tilt sensor using air medium
Author :
Jung, Dae Woong ; Choi, Ju Chan ; Lee, June Kyoo ; Jung, Ho ; Kong, Seong Ho
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Kyungpook Nat. Univ., Daegu, South Korea
Abstract :
A convection based multi-axis tilt sensor using air medium has many advantages, such as small size, simple structure, low cost, reliability and durability. In this paper, a study focused on optimizing two different parameters, the geometry of temperature sensors and air volume of encapsulated micro-chamber filled with air medium, is mainly reported.
Keywords :
microsensors; temperature sensors; MEMS-based tilt sensor; air medium; encapsulated microchamber; multiaxis tilt sensor; temperature sensor geometry; Costs; Etching; Fabrication; Nickel; Packaging; Sensor phenomena and characterization; Temperature distribution; Temperature sensors; Thermal sensors; Wafer bonding;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398205
