• DocumentCode
    3280540
  • Title

    Fabrication of temperature and carbon monoxide micro-sensors in a micro-reformer

  • Author

    Lee, Chi-Yuan ; Chang, Yu-Ming ; Chang, Chi-Chung

  • Author_Institution
    Dept. of Mech. Eng., Yuan Ze Univ., Taoyuan, Taiwan
  • fYear
    2011
  • fDate
    20-23 Feb. 2011
  • Firstpage
    150
  • Lastpage
    153
  • Abstract
    The several challenges associated with micro-reformers that have not yet been resolved include reducing their size, reducing the quantity of carbon monoxide (CO) they emit, and their integration in fuel cells. In this work, temperature and CO micro-sensors are applied in a micro-reformer to measure temperature and CO concentration. Micro-electro-mechanical systems (MEMS) are fabricated with temperature and CO micro-sensors on stainless-steel foil. The temperature and CO micro-sensors are placed in different positions inside the micro-reformer. The major advantages of the temperature and CO micro-sensors are their high accuracy and sensitivity and their ability to measure temperature and the CO concentration inside a micro-reformer.
  • Keywords
    carbon compounds; fuel cells; microfabrication; microsensors; sensitivity; temperature measurement; CO; fuel cell; microelectro-mechanical system; microreformer; microsensors; sensitivity; stainless-steel foil; temperature fabrication; temperature measurement; Calibration; Fuel cells; Gas detectors; Resistance; Temperature measurement; Temperature sensors; CO micro-sensor; MEMS; micro-reformer; temperature micro-sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
  • Conference_Location
    Kaohsiung
  • Print_ISBN
    978-1-61284-775-7
  • Type

    conf

  • DOI
    10.1109/NEMS.2011.6017317
  • Filename
    6017317