DocumentCode
3280875
Title
Chemical Vapor Deposition of Cu2 O and CuO nanosystems for innovative gas sensors
Author
Comini, Elisabetta ; Sberveglieri, Giorgio ; Barreca, Davide ; Sada, Cinzia ; Gasparotto, Alberto ; Maccato, Chiara ; Tondello, Eugenio
Author_Institution
Dept. of Chem. & Phys., Brescia Univ., Brescia, Italy
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
111
Lastpage
113
Abstract
Supported copper oxide nanosystems (CuxO, x = 1,2) were synthesized by chemical vapor deposition (CVD) on Al2O3 substrates. Structural and morphological characterization showed an evolution from polycrystalline Cu2O granular films to CuO samples with an entangled quasi 1-D morphology upon increasing the growth temperature from 350 to 550°C. For the first time, CVD copper oxide nanosystems were investigated in the gas sensing of CH3COCH3 and CH3CH2OH. The analyses revealed appreciable responses even at moderate operating temperatures, with characteristics directly dependent on the system composition and nano-organization.
Keywords
aluminium compounds; chemical vapour deposition; copper compounds; crystal morphology; gas sensors; organic compounds; substrates; Al2O3; Cu2O; CuO; chemical vapor deposition; copper oxide; innovative gas sensors; nanosystems; organic compounds; polycrystalline granular films; quasi1D morphology; substrates; temperature 350 degC to 550 degC; Chemical vapor deposition;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398223
Filename
5398223
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