Title :
Chemical Vapor Deposition of Cu2O and CuO nanosystems for innovative gas sensors
Author :
Comini, Elisabetta ; Sberveglieri, Giorgio ; Barreca, Davide ; Sada, Cinzia ; Gasparotto, Alberto ; Maccato, Chiara ; Tondello, Eugenio
Author_Institution :
Dept. of Chem. & Phys., Brescia Univ., Brescia, Italy
Abstract :
Supported copper oxide nanosystems (CuxO, x = 1,2) were synthesized by chemical vapor deposition (CVD) on Al2O3 substrates. Structural and morphological characterization showed an evolution from polycrystalline Cu2O granular films to CuO samples with an entangled quasi 1-D morphology upon increasing the growth temperature from 350 to 550°C. For the first time, CVD copper oxide nanosystems were investigated in the gas sensing of CH3COCH3 and CH3CH2OH. The analyses revealed appreciable responses even at moderate operating temperatures, with characteristics directly dependent on the system composition and nano-organization.
Keywords :
aluminium compounds; chemical vapour deposition; copper compounds; crystal morphology; gas sensors; organic compounds; substrates; Al2O3; Cu2O; CuO; chemical vapor deposition; copper oxide; innovative gas sensors; nanosystems; organic compounds; polycrystalline granular films; quasi1D morphology; substrates; temperature 350 degC to 550 degC; Chemical vapor deposition;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398223
