Title :
Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst
Author :
Vollebregt, Sten ; Schellevis, H. ; Beenakker, Kees ; Ishihara, Ryoichi
Author_Institution :
Delft Inst. of Microsyst. & Nanotechnol., Delft Univ. of Technol., Delft, Netherlands
Abstract :
Vertically aligned carbon nanotubes (CNT) were fabricated using a novel CoAlcatalyst at substrate temperatures as low as 350°C and analysed using Raman spectroscopy. Electrical measurement structures were fabricated and characterized using CNT bundles grown at 400°C. The resulting I-V characteristics display a slight non-linearity, likely due to a nonoptimal top contact. The first measurement results indicate CoAl can be an attractive candidate for back-end integration of CNT.
Keywords :
Raman spectroscopy; aluminium alloys; carbon nanotubes; catalysts; cobalt alloys; semiconductor growth; CoAl; Raman spectroscopy; back end of line compatible temperature; carbon nanotube vias; catalyst; electrical measurement structures; nonoptimal top contact; temperature 400 degC; vertically aligned carbon nanotubes; Carbon nanotubes; Coal; Integrated circuit interconnections; Iron; Plasma temperature; Substrates; Temperature measurement;
Conference_Titel :
Interconnect Technology Conference (IITC), 2013 IEEE International
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-0438-9
DOI :
10.1109/IITC.2013.6615602
