Title :
F-doped nanocrystalline SnO2 thin films for liquid petroleum gas (LPG) sensors
Author_Institution :
Dept. of Electron., King Mongkut´´s Inst. of Technol. Ladkrabang, Bangkok, Thailand
Abstract :
In this paper we reported the improvement sensing performance of nanocrystalline SnO2 thin film based LPG sensors by doping with fluorine. Un-doped and F-doped tin oxide films were prepared on glass substrates by dip-coating technique using a layer-by-layer deposition cycle (alternating between dip-coating a thin layer followed by a drying in air after each new layer). The results showed that this technique is superior to the conventional technique for both improving the film thickness uniformity and film transparency. Atomic Force Microscopy (AFM) and X-ray diffraction pattern measurements showed that the obtained thin films were nanocrystalline SnO2. Gas sensing characteristics (sensor response, response/recovery time and repeatability) of the nanocrystalline SnO2 sensors based on a planar interdigital structure were investigated at different operating temperatures and different LPG concentrations. The addition of fluorine to SnO2 was found to be advantageous for efficient detection of LPG gases, e.g. F-doped sensors were more stable at low operating temperature and had higher sensor response and faster response/recovery time, compared to un-doped sensor material.
Keywords :
X-ray diffraction; atomic force microscopy; dip coating; doping; fluorine; gas sensors; nanosensors; nanostructured materials; petroleum; thin film sensors; tin compounds; transparency; LPG concentration; LPG gas detection; LPG sensor; SnO2:F; Un-doped tin oxide film; X-ray diffraction pattern measurement; atomic force microscopy; dip-coating technique; gas sensing characteristics; glass substrate; layer-by-layer deposition cycle; liquid petroleum gas sensor; nanocrystalline sensors; nanocrystalline thin film transparency; planar interdigital structure; sun-doped sensor material; thin layer; undoped tin oxide films; Films; Gas detectors; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; Tin; Fluorine doping; Liquefied petroleum gas (LPG); SnO2 sensors; dip-coating;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017344