Title :
Frequency resolution of a multi degree of freedom resonator
Author :
Moran, K. ; DeMartini, B.E. ; Turner, K.L. ; Åström, K.J.
Author_Institution :
Dept. of Mech. Eng., UC Santa Barbara, Santa Barbara, CA, USA
Abstract :
This paper outlines the process for estimating measurable parameters in a multi degree of freedom micro resonator. Thermal mechanical noise provides a baseline limit for frequency resolution of micro resonators. We develop the likelihood function for a linear regression model of 2 degree of freedom resonator. Using the Cramer-Rao inequality we determine the minimum possible covariance to estimate parameters, such as the natural frequency of the system.
Keywords :
frequency estimation; maximum likelihood estimation; micromechanical resonators; regression analysis; Cramer-Rao inequality; frequency resolution; likelihood function; linear regression model; multidegree of freedom microresonator; parameter estimation; thermal mechanical noise; Chemical sensors; Cramer-Rao bounds; Displacement measurement; Frequency estimation; Frequency measurement; Mechanical sensors; Optical coupling; Oscillators; Parameter estimation; Thermal force;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398243
