• DocumentCode
    3281396
  • Title

    Polymer-coated surface acoustic wave sensor array for low concentration NH3 detection

  • Author

    Li, Yi-Tian ; Hao, Hsu-Chao ; Chen, Mei-Ching ; Lin, Tai-Hsuan ; Ku, Pei-Hsin ; Yang, Chia-Min ; Tang, Kea-Tiong ; Yao, Da-Jeng

  • Author_Institution
    Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2011
  • fDate
    20-23 Feb. 2011
  • Firstpage
    333
  • Lastpage
    337
  • Abstract
    Surface acoustic wave sensors are famous for its low cost, high resolution, and quick response time. In this paper, the SAW gas sensor for detecting low concentration of NH3 was presented. The gas sensor array is composed of 2×2 non-continuously working oscillators equipped with one reference SAW sensor and three SAW sensors coated with different polymers. To improve the selectivity and sensitivity, ten kinds of polymers with special functional group were coated on the sensing area as the sensing film. The gas recognition database was established by collecting and normalizing the results of interplay between polymers and target gas. The miniaturized SAW chip was developed for low cost and portability, more capacities of polymer-coated SAW sensors mounted on a limited region of sensor array chip. The PNVP-coated miniaturized SAW sensor has been successfully developed to detecting low concentration ammonia of 16 ppm. Compared with the original SAW sensor, the miniaturized SAW sensor coated with PNVP film shows larger frequency shift but similar performance for low concentration of NH3 detection after normalizing the results of interaction between polymer and ammonia.
  • Keywords
    ammonia; gas sensors; polymer films; sensor arrays; surface acoustic wave sensors; NH3; PNVP film; PNVP-coated miniaturized SAW sensor; gas recognition database; low concentration ammonia detection; low concentration detection; miniaturized SAW chip; noncontinuously working oscillator; polymer-coated SAW gas sensor array; polymer-coated surface acoustic wave gas sensor array; sensor array chip; Arrays; Films; Gas detectors; Plastics; Surface acoustic wave devices; Surface acoustic waves; Ammonia sensor; Low concentration; Surface acoustic wave; polymer films; sensor array;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
  • Conference_Location
    Kaohsiung
  • Print_ISBN
    978-1-61284-775-7
  • Type

    conf

  • DOI
    10.1109/NEMS.2011.6017361
  • Filename
    6017361