Infrared enhanced absorption of TiNx nano films

In the design of infrared detectors, nano films are more and more frequently used to improve infrared absorption and mechanical sensitivity. In this paper, a Titanium nitride (TiN_x) film was studied theoretically and experimentally as an infrared enhanced absorption layer. The TiN_x films at two different thicknesses and in three different content ratios were deposited and infrared absorption experiments in the range of 8~14μm were done. Experiment results show that the infrared absorbance is enhanced through depositing 5nm thick TiN_x nano films on SiN_x layer and the infrared absorbance of the films can be increased as the flow ratio of N₂/Ar get increased.