Title :
Table of contents
Abstract :
The following topics are dealt with: micromachined gyroscope; CMOS MEMS sensor; microfluidic system; biosensor; gas sensor; optical sensor; optical waveguides; nonvolatile memory; photovoltaic cells; fuel cells; pressure sensor; thin film transistor; bandpass filters; piezoelectric microcantilever; lithography; electronics packaging; microresonators; and microchips.
Keywords :
CMOS integrated circuits; biosensors; electronics packaging; fuel cells; gas sensors; gyroscopes; microfluidics; microsensors; optical sensors; optical waveguides; random-access storage; solar cells; thin film transistors; CMOS MEMS sensor; biosensor; electronics packaging; fuel cells; gas sensor; microchips; microfluidic system; micromachined gyroscope; nonvolatile memory; optical sensor; optical waveguides; photovoltaic cells; pressure sensor; thin film transistor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017392
