Title :
Effective photoluminescence in a large-area array of Ta2O5 nanodots (PL of Ta2O5 nanodots)
Author :
Devan, Rupesh S. ; Lin, Ching-Ling ; Lin, Jin-Han ; Patil, Ranjit R. ; Ma, Yuan-Ron
Author_Institution :
Dept. of Phys., Nat. Dong Hwa Univ., Hualien, Taiwan
Abstract :
In this study we present the synthesis of the large-area Ta2O5 nanodot array by utilizing hot filament metal vapor deposition technique. The Ta2O5 nanodots were arranged in a large-area array on a Si wafer, and their average diameter is ~35 nm. X-ray photoemission spectroscopy (XPS) revealed the stoichiometric Ta and O compositions of Ta2O5 nanodots. Raman spectroscopy showed the Ta2O5 nanodots to be of orthorhombic (β) crystal. Photoluminescence (PL) spectroscopy displayed that the β-Ta2O5 nanodots provided green and red light emissions at room temperature.
Keywords :
Raman spectra; X-ray photoelectron spectra; nanofabrication; nanostructured materials; photoluminescence; stoichiometry; tantalum compounds; Raman spectroscopy; Si; Ta2O5; X-ray photoemission spectroscopy; XPS; effective photoluminescence spectroscopy; hot filament metal vapor deposition technique; large-area nanodot array; orthorhombic crystal; red light emissions; stoichiometry; temperature 293 K to 298 K; Arrays; Electron traps; Optical films; Optical variables control; Silicon; Spectroscopy; Raman scattering; Ta2O5; X-ray photoemission; hot filament metal vapor deposition; nanodot; photoluminescence (PL); spectroscopy (XPS); trap-level;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017393
