Title :
Static deflection control for sensitivity enhancement of piezoelectric ultrasonic microsensors on silicon dioxide diaphragms
Author :
Yamashita, Kaoru ; Noda, Minoru ; Yoshizaki, Tomoya ; Okuyama, Masanori
Author_Institution :
Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
Abstract :
Sensitivity of piezoelectric ultrasonic microsensors has been enhanced through static deflection control on silicon dioxide diaphragm structures. A precise deflection control process has been developed for fragile SiO2 diaphragms derived from a both-side oxidized normal silicon wafer. The diaphragms have been re-buckled upward without breaking and the sensitivity has been improved by four times on average on the deflection-controlled SiO2 diaphragm sensors.
Keywords :
diaphragms; microsensors; piezoelectric transducers; silicon compounds; ultrasonic transducers; SiO2; both-side oxidized normal silicon wafer; piezoelectric ultrasonic microsensors; sensitivity enhancement; silicon dioxide diaphragm structures; static deflection control; Biosensors; Capacitive sensors; Costs; Electrodes; Gold; Microsensors; Piezoelectric films; Residual stresses; Silicon compounds; Silicon on insulator technology;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398286
