• DocumentCode
    3282202
  • Title

    Static deflection control for sensitivity enhancement of piezoelectric ultrasonic microsensors on silicon dioxide diaphragms

  • Author

    Yamashita, Kaoru ; Noda, Minoru ; Yoshizaki, Tomoya ; Okuyama, Masanori

  • Author_Institution
    Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
  • fYear
    2009
  • fDate
    25-28 Oct. 2009
  • Firstpage
    502
  • Lastpage
    505
  • Abstract
    Sensitivity of piezoelectric ultrasonic microsensors has been enhanced through static deflection control on silicon dioxide diaphragm structures. A precise deflection control process has been developed for fragile SiO2 diaphragms derived from a both-side oxidized normal silicon wafer. The diaphragms have been re-buckled upward without breaking and the sensitivity has been improved by four times on average on the deflection-controlled SiO2 diaphragm sensors.
  • Keywords
    diaphragms; microsensors; piezoelectric transducers; silicon compounds; ultrasonic transducers; SiO2; both-side oxidized normal silicon wafer; piezoelectric ultrasonic microsensors; sensitivity enhancement; silicon dioxide diaphragm structures; static deflection control; Biosensors; Capacitive sensors; Costs; Electrodes; Gold; Microsensors; Piezoelectric films; Residual stresses; Silicon compounds; Silicon on insulator technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2009 IEEE
  • Conference_Location
    Christchurch
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-4548-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2009.5398286
  • Filename
    5398286
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3282202