DocumentCode
3282217
Title
A MEMS phase detector at X-band based on MMIC technology
Author
Hua, Di ; Liao, Xiaoping ; Jiao, Yongchang
Author_Institution
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
506
Lastpage
508
Abstract
A novel integrated phase detector at X-band using MEMS technology is presented. The detector is composed of a power combiner and a thermopile power sensor based on Seebeck effect, both of which are passive devices. It is based on sensing the power of the combined signal. The phase shift is proportional to the output power, which is sensed with the power sensor. Therefore, low DC power consumption is realized with simple structure. This phase detector is compatible with GaAs MMIC technology. It is measured with 23 dBm at 10 GHz, and the sensitivity is 54.5 ¿V/degree.
Keywords
MMIC; Seebeck effect; microsensors; phase detectors; thermopiles; DC power consumption; MEMS phase detector; MMIC technology; Seebeck effect; frequency 10 GHz; integrated phase detector; passive devices; power combiner; thermopile power sensor; Detectors; Energy consumption; Gallium arsenide; MMICs; Micromechanical devices; Phase detection; Power combiners; Power generation; Thermal sensors; Thermoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398287
Filename
5398287
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