Fabrication of a multi-modal sensor with PH, EC and temperature sensing areas for agriculture application

Author

Futagawa, Masato ; Takao, Hidekuni ; Ishida, Makoto ; Sawada, Kazuaki ; Iwasaki, Takuya

Author_Institution

Dept. of Electron. & Inf. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2009

fDate

25-28 Oct. 2009

Firstpage

2013

Lastpage

2016

Abstract

A multi-modal sensor, with which was possible to simultaneously measure pH, electrical conductivity (EC) and temperature, was fabricated. The pH sensor, EC sensor, and temperature sensor were integrated using compatible complementary metal-oxide semiconductor (CMOS) logic technology on a small Si chip (area, 25 mm²). Simultaneous measurements of pH, EC and temperature were demonstrated, and the sensor was used successfully to measure three different kinds of signal from the sensors with a pH 4.01 buffering solution. In another measurement, the sensor was possible to be inserted in soil, and used to successfully measure EC in real time for 6 days.

Keywords

CMOS logic circuits; agriculture; chemical sensors; electric sensing devices; electrical conductivity measurement; microsensors; pH measurement; temperature measurement; temperature sensors; CMOS logic; agriculture; complementary metal-oxide semiconductor logic technology; electrical conductivity sensor; multimodal sensor chip; pH sensor; temperature sensor; Agriculture; CMOS technology; Conductivity measurement; Electric variables measurement; Fabrication; MOS devices; Multimodal sensors; Semiconductor device measurement; Soil measurements; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2009 IEEE

Conference_Location

Christchurch

ISSN

1930-0395

Print_ISBN

978-1-4244-4548-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2009.5398294

Filename

5398294