Title :
A CMOS Compatible Single Polysilicon Embedded NVM
Author :
Bu, Jiankang ; Parker, Courtney ; Prosack, Hank
Keywords :
Capacitors; Costs; Degradation; Hot carriers; MOS devices; MOSFET circuits; Nonvolatile memory; Plasma temperature; Plasma transport processes; Tunneling;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1595956
