3282683

Study of Leakage-Induced Photon Emission processes in sub-90 nm CMOS Devices

Weizman, Y. ; Gurfinkel, M. ; Margulis, A. ; Fefer, Y. ; Shapira, Y. ; Baruch, E.

2005

Dec. 7-9, 2005

44

45

CMOS process; Current measurement; Hot carriers; Impact ionization; Leakage current; MOSFETs; Optical saturation; Stimulated emission; Temperature; Threshold voltage;

English

ieee

Semiconductor Device Research Symposium, 2005 International

1-4244-0083-X

conf

10.1109/ISDRS.2005.1595968

1595968