DocumentCode
3282683
Title
Study of Leakage-Induced Photon Emission processes in sub-90 nm CMOS Devices
Author
Weizman, Y. ; Gurfinkel, M. ; Margulis, A. ; Fefer, Y. ; Shapira, Y. ; Baruch, E.
fYear
2005
fDate
Dec. 7-9, 2005
Firstpage
44
Lastpage
45
Keywords
CMOS process; Current measurement; Hot carriers; Impact ionization; Leakage current; MOSFETs; Optical saturation; Stimulated emission; Temperature; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2005 International
Print_ISBN
1-4244-0083-X
Type
conf
DOI
10.1109/ISDRS.2005.1595968
Filename
1595968
Link To Document