Title :
Development of PVdF based pressure sensor for low pressure application
Author :
Mahale, Bhoopesh P. ; Bodas, Dhananjay ; Gangal, S.A.
Author_Institution :
Dept. of Electron. Sci., Univ. of Pune, Pune, India
Abstract :
Development of poly(vinyl difluoride) (PVdF) based dynamic pressure sensor for low pressure application is reported in the present paper. β-phase PVdF film of thickness 10 μm is fabricated using spin casting method with thermally evaporated Al electrodes (200 nm) on both sides of the film. The film is polled and packaged in a poly(dimethyl siloxane) (PDMS) block. The exposed area of the pressure sensor is ~500μm in diameter. A signal conditioning circuit is designed to amplify the signal and a NI DAQ card with LabVIEW software is used to acquire the signal on a PC. The dynamic pressure response of the sensor is recorded which shows linearity in detection. Pressure measured by the sensor is in the range of 10 to 150kPa.
Keywords :
casting; polymers; pressure sensors; signal conditioning circuits; virtual instrumentation; Al electrodes; LabVIEW software; NI DAQ card; PVdF; dynamic pressure sensor; pressure measurement; signal conditioning circuit; size 10 mum; spin casting method; Coatings; Fabrication; Films; Packaging; Temperature sensors; Thermal stability;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017441
