Title :
MEMS-based buoyancy and propelling mechanisms for a micro-submarine
Author :
Ku, Che-Ming ; Liao, Hsin-Hung ; Yang, Yao-Joe
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
In this work, we developed a MEMS-based micro-submarine which the thermopneumatic mechanism is used to control the movement of sink and float. The equivalent circuit model of the thermopneumatic mechanism is formulated. The analytical solution for predicting the buoyancy of the submarine is also derived. A propelling method is also proposed. The dimensions of the micro-submarine are 2.29 mm × 3.70 mm × 0.71 mm. The micro-submarine motion of sinking, floating and moving forward are also demonstrated.
Keywords :
equivalent circuits; micromechanical devices; motion control; pneumatic control equipment; semiconductor device models; MEMS-based buoyancy mechanism; MEMS-based microsubmarine; equivalent circuit model; float; movement control; propelling mechanism; sink; thermopneumatic mechanism; Glass; Propulsion; Resistance heating; Substrates; Thermal resistance;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017461
