A new integrated temperature and humidity

Author

Fang, Zhen ; Zhao, Zhan ; Zhang, Jiangang ; Du, Lidong ; Xu, Jing ; Geng, Daoqu ; Shi, Yaohong

Author_Institution

State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

788

Lastpage

791

Abstract

MEMS-based integrated temperature and humidity sensor has the advantages of low weight, small size, low cost, easy integrity and is a highly advanced apparatus of identity, reliability, easy production. The feasibility of thermal conductivity method used to measure humidity and structure of the integrated temperature and humidity sensor are analyzed in this paper, and provides the measuring methods in detail. We mainly focus on measuring result of the humidity part, and verify the excellent performance of the integrated temperature and humidity sensor, then introducing a function W(h)=V₂²-k*V₁², here k is a constant expressed by k=R₂/R₁, and W(h) becomes a simple monotonic curve independent of the ambient temperature. Based on designed integrated sensor, the portable measurement device have been designed and tested in field.

Keywords

humidity sensors; microsensors; temperature sensors; thermal conductivity measurement; MEMS; ambient temperature; integrated sensor; integrated temperature-humidity sensor; monotonic curve; thermal conductivity method; Conductivity; Humidity; Humidity measurement; Pollution measurement; Resistance; Temperature measurement; Temperature sensors; integrated temperature and humidity sensor; micro-air-bridge; thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017472

Filename

6017472