Title :
Design and fabrication of a hollow micro-disk mass sensor
Author :
Zhao, L. ; Jiao, J. ; Zhang, Y. ; Mi, B. ; Gu, J. ; Zhou, P. ; Zhang, X.
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
In this paper, a novel hollow micro-disk mass sensor based on mode generation and degeneration principle is presented, which has the advantages of self-compensating environmental fluctuation and eliminating viscous damping as vacuum packaged. The device configuration, including the width of support beams, the channel height and the allocation of the sensing piezoresistors are carefully analyzed and then designed to achieve better sensitivity. Using a double sacrificial layer process along with DRIE, the sensor was successfully fabricated and the preliminary test has been accomplished.
Keywords :
discs (structures); mass measurement; micromechanical resonators; microsensors; piezoresistive devices; channel height; device configuration; double sacrificial layer; hollow microdisk mass sensor; mode degeneration principle; mode generation principle; self-compensating environmental fluctuation; sensing piezoresistors; sensitivity; support beams; viscous damping; Biosensors; Chemical and biological sensors; Damping; Electrodes; Fabrication; Fluctuations; Optical resonators; Optical sensors; Resonance; Resonant frequency;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398356
