Title :
Towards high resolution pico-projector applications: Design improvements on MEMS scanning mirror
Author :
Ma, Wei ; Chan, Ho- Yin ; Wong, Chun Cheong ; Yiu, Checky ; Chan, Yick Chuen ; Lee, Francis Chee Shuen
Author_Institution :
Mater. & Packaging Technol. Group, Hong Kong Appl. Sci. & Technol. Res. Inst. Co. Ltd., Hong Kong, China
Abstract :
Design and implementation of a micro scanning mirror for the application of WVGA resolution (848×480) pico-projector display is presently reported. A FEM model for damping coefficient analysis is built and shows a good agreement with experiment result. In addition, stress study for the torsional bar is performed to deal with fracture issue. With the consideration on damping coefficient and stress in torsional bar, the new designed and implemented micro scanning mirror has shown to have a >;6° scanning angle at 21kHz resonant frequency.
Keywords :
damping; finite element analysis; micromechanical devices; micromirrors; optical projectors; MEMS scanning mirror; damping coefficient analysis; finite element model; frequency 21 kHz; high resolution pico-projector; scanning angle; torsional bar; Analytical models; Damping; Finite element methods; Mirrors; Oscillators; Resonant frequency; Stress; WVGA resolution; damping coefficient; maximum stress; pico- projector; scanning mirror;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017482
