• DocumentCode
    3283626
  • Title

    A capacitance level sensor design and sensor signal enhancement

  • Author

    Li, Yu-Ting ; Chao, Chih-Ming ; Wang, Kerwin

  • Author_Institution
    Dept. of Mechatron. Eng., Nat. Changhua Univ. of Educ., Changhua, Taiwan
  • fYear
    2011
  • fDate
    20-23 Feb. 2011
  • Firstpage
    847
  • Lastpage
    850
  • Abstract
    This paper introduces a novel fringe field capacitive sensor. To enhance the sensor signal, various sensor electrode design strategies and a surface modification method are introduced, discussed and compared. The sensors are characterized by both simulations and experiments. The experiment results demonstrate the sensor capability of water level measuring. In addition, fringing field sensor of the field strength across the target by the dielectric strength can be used to measure the dielectric constant or component of a solution. The experiment results show that nitrogen plasma surface modification can improve the sensitivity from 69pF/mm to 97pF/mm.
  • Keywords
    capacitive sensors; dielectric properties; nitrogen; signal processing; surface treatment; N; capacitance sensor; fringing field sensor; nitrogen plasma surface modification; sensor electrode design; sensor signal enhancement; surface modification method; water level measurement; Aluminum; Capacitance; Capacitive sensors; Electrodes; Plasmas; Robot sensing systems; Surface treatment; Fringing electric field; atmospheric-pressre plasma; capacitance sensor; level sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
  • Conference_Location
    Kaohsiung
  • Print_ISBN
    978-1-61284-775-7
  • Type

    conf

  • DOI
    10.1109/NEMS.2011.6017486
  • Filename
    6017486