Title :
A capacitance level sensor design and sensor signal enhancement
Author :
Li, Yu-Ting ; Chao, Chih-Ming ; Wang, Kerwin
Author_Institution :
Dept. of Mechatron. Eng., Nat. Changhua Univ. of Educ., Changhua, Taiwan
Abstract :
This paper introduces a novel fringe field capacitive sensor. To enhance the sensor signal, various sensor electrode design strategies and a surface modification method are introduced, discussed and compared. The sensors are characterized by both simulations and experiments. The experiment results demonstrate the sensor capability of water level measuring. In addition, fringing field sensor of the field strength across the target by the dielectric strength can be used to measure the dielectric constant or component of a solution. The experiment results show that nitrogen plasma surface modification can improve the sensitivity from 69pF/mm to 97pF/mm.
Keywords :
capacitive sensors; dielectric properties; nitrogen; signal processing; surface treatment; N; capacitance sensor; fringing field sensor; nitrogen plasma surface modification; sensor electrode design; sensor signal enhancement; surface modification method; water level measurement; Aluminum; Capacitance; Capacitive sensors; Electrodes; Plasmas; Robot sensing systems; Surface treatment; Fringing electric field; atmospheric-pressre plasma; capacitance sensor; level sensor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017486