• DocumentCode
    3283648
  • Title

    Formal description and language of MEMS design

  • Author

    Zhao, Xin ; Li, Xin ; Lu, Guizhang

  • Author_Institution
    Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin, China
  • fYear
    2011
  • fDate
    20-23 Feb. 2011
  • Firstpage
    851
  • Lastpage
    854
  • Abstract
    We present a formal method to abstractively describe our system “IP-library based MEMS device visualized simulation and verification tool” and the design process of a MEMS device. As this method providing a model representation and inference rule based on mathematical logic, it ensures the system run precisely and perfectly. Then we take the Micro-pump design process as an example to show our system simulation result based on this design language.
  • Keywords
    CAD; electronic engineering computing; formal languages; formal logic; formal verification; inference mechanisms; micropumps; IP-library; MEMS device design process; design language; formal description; formal method; inference rule; mathematical logic; micropump design process; model representation; verification tool; visualized simulation; Films; IP networks; Layout; Libraries; Micromechanical devices; Solid modeling; Three dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
  • Conference_Location
    Kaohsiung
  • Print_ISBN
    978-1-61284-775-7
  • Type

    conf

  • DOI
    10.1109/NEMS.2011.6017487
  • Filename
    6017487