DocumentCode
3283648
Title
Formal description and language of MEMS design
Author
Zhao, Xin ; Li, Xin ; Lu, Guizhang
Author_Institution
Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin, China
fYear
2011
fDate
20-23 Feb. 2011
Firstpage
851
Lastpage
854
Abstract
We present a formal method to abstractively describe our system “IP-library based MEMS device visualized simulation and verification tool” and the design process of a MEMS device. As this method providing a model representation and inference rule based on mathematical logic, it ensures the system run precisely and perfectly. Then we take the Micro-pump design process as an example to show our system simulation result based on this design language.
Keywords
CAD; electronic engineering computing; formal languages; formal logic; formal verification; inference mechanisms; micropumps; IP-library; MEMS device design process; design language; formal description; formal method; inference rule; mathematical logic; micropump design process; model representation; verification tool; visualized simulation; Films; IP networks; Layout; Libraries; Micromechanical devices; Solid modeling; Three dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location
Kaohsiung
Print_ISBN
978-1-61284-775-7
Type
conf
DOI
10.1109/NEMS.2011.6017487
Filename
6017487
Link To Document