Title :
Formal description and language of MEMS design
Author :
Zhao, Xin ; Li, Xin ; Lu, Guizhang
Author_Institution :
Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin, China
Abstract :
We present a formal method to abstractively describe our system “IP-library based MEMS device visualized simulation and verification tool” and the design process of a MEMS device. As this method providing a model representation and inference rule based on mathematical logic, it ensures the system run precisely and perfectly. Then we take the Micro-pump design process as an example to show our system simulation result based on this design language.
Keywords :
CAD; electronic engineering computing; formal languages; formal logic; formal verification; inference mechanisms; micropumps; IP-library; MEMS device design process; design language; formal description; formal method; inference rule; mathematical logic; micropump design process; model representation; verification tool; visualized simulation; Films; IP networks; Layout; Libraries; Micromechanical devices; Solid modeling; Three dimensional displays;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017487
