• DocumentCode
    3283651
  • Title

    Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches

  • Author

    Koo, Sang-Mo ; Li, Qiliang ; Edelstein, Monica D. ; Richter, Curt A. ; Vogel, Eric M.

  • fYear
    2005
  • fDate
    Dec. 7-9, 2005
  • Firstpage
    171
  • Lastpage
    172
  • Keywords
    CMOS logic circuits; Doping; Electronic equipment testing; FETs; Fabrication; Logic devices; Nanoscale devices; Schottky barriers; Semiconductor device testing; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2005 International
  • Print_ISBN
    1-4244-0083-X
  • Type

    conf

  • DOI
    10.1109/ISDRS.2005.1596037
  • Filename
    1596037
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3283651