Title :
Platinum sputtered CMOS-MEMS electrothermal probes with piezoresistive force sensing
Author :
Liu, J. ; Draghi, L. ; Noman, M. ; Bain, J.A. ; Schlesinger, T.E. ; Fedder, G.K.
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
We report tip platform platinum sputtering and piezoresistive force sensing employed in CMOS-MEMS electrothermal probes. Pt sputtering is developed to achieve small and reliable electrical contact resistance. Piezoresistive sensors are used to track the force applied on the tips to detect the mechanical contact of the probe and the substrate and to aid in tip registration to the patterned substrates.
Keywords :
contact resistance; electrical contacts; micromechanical devices; piezoelectric transducers; platinum; sputtering; electrical contact resistance; mechanical contact; piezoresistive force sensing; platinum sputtered CMOS-MEMS electrothermal probes; Atomic force microscopy; Contacts; Electrothermal effects; Force sensors; Micromechanical devices; Piezoresistance; Platinum; Probes; Sputter etching; Sputtering;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398369
