• DocumentCode
    3283728
  • Title

    Platinum sputtered CMOS-MEMS electrothermal probes with piezoresistive force sensing

  • Author

    Liu, J. ; Draghi, L. ; Noman, M. ; Bain, J.A. ; Schlesinger, T.E. ; Fedder, G.K.

  • Author_Institution
    Carnegie Mellon Univ., Pittsburgh, PA, USA
  • fYear
    2009
  • fDate
    25-28 Oct. 2009
  • Firstpage
    1911
  • Lastpage
    1914
  • Abstract
    We report tip platform platinum sputtering and piezoresistive force sensing employed in CMOS-MEMS electrothermal probes. Pt sputtering is developed to achieve small and reliable electrical contact resistance. Piezoresistive sensors are used to track the force applied on the tips to detect the mechanical contact of the probe and the substrate and to aid in tip registration to the patterned substrates.
  • Keywords
    contact resistance; electrical contacts; micromechanical devices; piezoelectric transducers; platinum; sputtering; electrical contact resistance; mechanical contact; piezoresistive force sensing; platinum sputtered CMOS-MEMS electrothermal probes; Atomic force microscopy; Contacts; Electrothermal effects; Force sensors; Micromechanical devices; Piezoresistance; Platinum; Probes; Sputter etching; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2009 IEEE
  • Conference_Location
    Christchurch
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-4548-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2009.5398369
  • Filename
    5398369
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3283728