DocumentCode
3283760
Title
Strained-Si NMOSFETs on thin 200 nm virtual substrates
Author
Hellström, Per-Erik ; Edholm, Jonas ; Östling, Mikael ; Olsen, Sarah ; O´Neill, Anthony ; Lyutovich, Klara ; Oehme, Michael ; Kasper, Erich
fYear
2005
fDate
Dec. 7-9, 2005
Firstpage
185
Lastpage
186
Keywords
Buffer layers; Capacitive sensors; Germanium silicon alloys; Information technology; MOSFET circuits; Microelectronics; Molecular beam epitaxial growth; Silicon germanium; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2005 International
Print_ISBN
1-4244-0083-X
Type
conf
DOI
10.1109/ISDRS.2005.1596044
Filename
1596044
Link To Document