DocumentCode :
3283775
Title :
Development of High frequency Love Mode Surface Acoustic Wave ZnO/SiO2/Si Devices
Author :
Krishnamoorthy, S. ; Iliadis, A.A.
fYear :
2005
fDate :
Dec. 7-9, 2005
Firstpage :
189
Lastpage :
190
Keywords :
Acoustic propagation; Acoustic waves; Annealing; Capacitive sensors; Fingers; Frequency; Pulsed laser deposition; Substrates; Surface acoustic wave devices; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
Type :
conf
DOI :
10.1109/ISDRS.2005.1596046
Filename :
1596046
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3283775
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