Title :
Surface and Interface Analysis of MgxZn1-xO cubic and hexagonal phases by X-Ray Photoelectron and Rutherford Back Scattering Spectroscopies
Author :
Hullavarad, S.S. ; Pugel, D.E. ; Dhar, S. ; Takeuchi, I. ; Venkatesan, T. ; Vispute, R.D.
Keywords :
Alloying; Chemical analysis; Optical films; Optical scattering; Optical sensors; Particle scattering; Radiation detectors; Spectroscopy; X-ray scattering; Zinc oxide;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596049