Title :
A Novel humidity sensor with a constant temperature measurement mechanism
Author :
Zhang, Jiangang ; Fang, Zhen ; Geng, Daoqu ; Zhao, Zhan
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China
Abstract :
We present a humidity sensor with a constant temperature measurement mechanism to ensure both the elimination of the ice on the surface of the sensor and the controllable temperature of the sensor chip in the low ambient temperature condition. In this humidity sensor, the capacitive type humidity sensitive unit is located at a suspended membrane, and the lower electrode of humidity sensitive unit has two very important roles in the sensor: one is the lower electrode of capacitor, the other one is the controllable heater. The test result of this humidity sensor shows that the sensor has a wide range of sensing ambient relative humidity from 25%RH to 95%RH, and can work in a controllable constant temperature in different ambient temperature environment.
Keywords :
humidity sensors; temperature measurement; capacitive type humidity sensitive unit; capacitor lower electrode; constant temperature measurement mechanism; controllable heater; humidity sensor; ice elimination; sensor chip controllable temperature; suspended membrane; Electrodes; Heating; Humidity; Materials; Temperature measurement; Temperature sensors; capacitive humidity sensor; constant chip temperature; multifunction of the lower electrode; suspended membrane;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017519
