Title :
PMMA high sensitive capacitive micro accelerometer fabricated based on hot embossing
Author :
Amaya, Satoshi ; Dao, Dzung Viet ; Sugiyama, Susumu
Author_Institution :
TOWA Corp., Kyoto, Japan
Abstract :
This paper presents for the first time the fabrication and testing of a PMMA capacitive micro accelerometer based on hot embossing and ultra-precision machining. The detection principle of the PMMA micro accelerometer is based on closing-gap capacitive combs. Since the sensor is made of PMMA polymer, it would be very flexible, high sensitive and low cost. The PMMA micro accelerometer was tested and very high sensitivity of 0.4 pF /G or equivalent to 0.16 V/G/V was obtained.
Keywords :
accelerometers; capacitive sensors; embossing; micromachining; microsensors; polymers; PMMA; closing-gap capacitive combs; high precision machining; high sensitive capacitive microaccelerometer; hot embossing; polymer; ultra-precision machining; Accelerometers; Bonding; Costs; Electrodes; Embossing; Fabrication; Fingers; Micromechanical devices; Polymers; Silicon;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398397
