DocumentCode
3284347
Title
Nanosystems - The Next MEMS Revolution
Author
Polla, Dennis L.
fYear
2005
fDate
Dec. 7-9, 2005
Firstpage
256
Lastpage
256
Keywords
Chemical technology; Electronics packaging; Intelligent actuators; Intelligent sensors; Manufacturing processes; Microelectromechanical systems; Micromechanical devices; Nanobioscience; Nanoelectromechanical systems; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2005 International
Print_ISBN
1-4244-0083-X
Type
conf
DOI
10.1109/ISDRS.2005.1596081
Filename
1596081
Link To Document