Optimization on the self-aligned growth of carbon nanotube

Author

Wu, Ying ; Ou, Yihong ; Bai, Junjie ; Yang, Xing ; Sun, Lijun ; Zhou, Zhaoying

Author_Institution

Chongqing Univ. of Sci. & Technol., Chongqing, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

1016

Lastpage

1019

Abstract

The principle of gas-flowing assistant growing of carbon nanotube is described in this paper. The effect of gas-flow was analyzed with numerical simulation, which can give some instruction for the self-aligned growth of carbon nanotube. Scanning electronic microscopy (SEM) images demonstrate that the self-aligned carbon nanotube can be realized by a gas-flowing CVD process and the distribution of carbon nanotube can be controlled by the gas-flowing rates. This research will provide a hopeful approach to the fabrication of CNT-based device.

Keywords

carbon nanotubes; chemical vapour deposition; numerical analysis; scanning electron microscopy; C; CNT-based device; SEM images; gas-flowing CVD process; numerical simulation; scanning electronic microscopy; self-aligned carbon nanotube; self-aligned growth optimisation; Boats; Carbon nanotubes; Educational institutions; Electron tubes; Fabrication; Furnaces; Scanning electron microscopy; carbon nanotube; gas-flow assisted growth; simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017528

Filename

6017528