Title :
Microhotplate-Based Sensor Platform for Standard Submicron CMOS SoC Designs
Author :
Afridi, M. ; Hefner, A. ; Geist, J. ; Ellenwood, C. ; Varma, A. ; Jacob, B.
Keywords :
Biomembranes; CMOS technology; Electrical resistance measurement; Fabrication; Micromachining; Microsensors; Microstructure; Semiconductor device measurement; System-on-a-chip; Temperature sensors;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596084
