DocumentCode :
3284452
Title :
Indium phosphide MEMS for integrated bio-sensing
Author :
Siwak, Nathan ; Pruessner, Marcel W. ; McGee, Jonathan ; Ghodssi, Reza
Author_Institution :
Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD
fYear :
2005
fDate :
7-9 Dec. 2005
Firstpage :
264
Lastpage :
265
Abstract :
We present a MEMS cantilever resonator sensing platform in InP utilizing an optical readout scheme for applications in biosensing. Devices with resonant frequencies as high as 1 MHz are demonstrated with Q factors of ~160 in air and calculated mass sensitivities as high as Deltam/Deltaf= 4.5 times 10-16g/Hz
Keywords :
III-V semiconductors; biosensors; cantilevers; indium compounds; micromechanical resonators; microsensors; InP; MEMS cantilever resonator; integrated biosensor; optical readout scheme; Biomedical optical imaging; Biosensors; Detectors; Frequency measurement; Indium phosphide; Micromechanical devices; Optical resonators; Optical sensors; Optical waveguides; Resonant frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Conference_Location :
Bethesda, MD
Print_ISBN :
1-4244-0083-X
Type :
conf
DOI :
10.1109/ISDRS.2005.1596086
Filename :
1596086
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3284452
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