• DocumentCode
    3284452
  • Title

    Indium phosphide MEMS for integrated bio-sensing

  • Author

    Siwak, Nathan ; Pruessner, Marcel W. ; McGee, Jonathan ; Ghodssi, Reza

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD
  • fYear
    2005
  • fDate
    7-9 Dec. 2005
  • Firstpage
    264
  • Lastpage
    265
  • Abstract
    We present a MEMS cantilever resonator sensing platform in InP utilizing an optical readout scheme for applications in biosensing. Devices with resonant frequencies as high as 1 MHz are demonstrated with Q factors of ~160 in air and calculated mass sensitivities as high as Deltam/Deltaf= 4.5 times 10-16g/Hz
  • Keywords
    III-V semiconductors; biosensors; cantilevers; indium compounds; micromechanical resonators; microsensors; InP; MEMS cantilever resonator; integrated biosensor; optical readout scheme; Biomedical optical imaging; Biosensors; Detectors; Frequency measurement; Indium phosphide; Micromechanical devices; Optical resonators; Optical sensors; Optical waveguides; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2005 International
  • Conference_Location
    Bethesda, MD
  • Print_ISBN
    1-4244-0083-X
  • Type

    conf

  • DOI
    10.1109/ISDRS.2005.1596086
  • Filename
    1596086
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3284452