Title :
Athermal Annealing of Ion-implanted SiC
Author :
Mulpuri, K.B. ; Qadri, S.B. ; Grun, J. ; Ridgway, M.C.
Keywords :
Acoustic pulses; Annealing; Area measurement; Electric resistance; Electrical resistance measurement; Optical pulse generation; Optical pulses; Plasma temperature; Silicon carbide; Thermal resistance;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596096
