Title :
Study on miniature ribbon microphone
Author_Institution :
Dept. of Electro-Opt. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
This paper presents the design and simulation of a miniature ribbon microphone. The miniaturization of traditional aluminum ribbon microphone was realized by MEMS technology. An asymmetrical coil structure was designed in order to overcome electromotive force direction problem. Under the optimized design and fabrication, the responsivity of ribbon diaphragm is -54.8 dBV/Pa (@1 kHz) It is corresponding to 1.82 mV/Pa sensitivity. Correspondingly, the responsivity of the commercially traditional ribbon microphone is -50 to -60 dBV/ Pa (@1k Hz). Obviously, the performance of a miniature ribbon microphone can provide a good performance.
Keywords :
electric potential; micromechanical devices; microphones; MEMS technology; aluminum ribbon microphone; electromotive force direction problem; fabrication; frequency 1 Hz; miniature ribbon microphone; optimized design; ribbon diaphragm; Coils; Frequency response; Magnetic flux density; Microphones; Sensitivity; Silicon; Vibrations; diaphragm; frequency response; miniature ribbon microphone; responsivity;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017553
