Nano-Particle Polymer Composite MEMS corrosion

This paper presents the concept, design, and diffusion experiments of a new type of MEMS corrosion sensor based on Nano-Particle Polymer Composites as the sensing element. The concept of using MEMS for in-situ corrosion sensing for long-term applications have been proposed recently by our research lab. Past developments in the microfabrication of polymers have enabled the ability to pattern micro- and nano-particles embedded into elastomers such as polyurethanes and silicones. By using metallic particles embedded into varying types of polymers, a tailorable MEMS corrosion sensor is currently being developed. The underlying principle of this sensor is based on the direct sensing of the corrosion of specific target material (embedded particles) instead of indirect environmental measurements. The polymer matrix provides the ability to control the diffusion of corrosion agents, absorption/desorption kinetics, and the oxidation of the metallic particles. A reference sensor consisting of noble particles is then used to provide the degradation information of the polymer matrix itself, thus the effects of the metal corrosion can be extracted using this differential sensor arrangement.