• DocumentCode
    3284836
  • Title

    GaPO4: an interesting crystal for vibrating inertial sensors

  • Author

    Le Traon, Olivier ; Ducloux, O. ; Levy, R. ; Masson, S.

  • Author_Institution
    Physic Dept., ONERA, Chatillon, France
  • fYear
    2009
  • fDate
    25-28 Oct. 2009
  • Firstpage
    1819
  • Lastpage
    1823
  • Abstract
    New experimental results on Gallium Orthophosphate (GaPO4) vibrating beams are presented: a quality factor (Q) of 700 000 has been measured for a one millimeter width beam at about 10 kHz, as well as Q of 130 000 for a 150 ¿m beam width at 110 kHz. At this frequency range, such high quality factors are obtained for the first time on GaPO4 flexure mode beams. Frequency temperature dependence of 10 to 20 ppm/K has been also measured, depending on the beam orientation, in accordance with the theoretical predictions. The GaPO4 is a quartz homeotype piezoelectric single crystal, well-known for its temperature stability (up to 970°C) and its higher electromechanical coupling coefficients than the quartz. These new results confirm the potentiality of GaPO4 in the field of vibrating inertial sensors: for Vibrating Beam Accelerometer (VBA) an improvement of the bias stability -i.e frequency stability - by a factor 10 is expected on the basis of the measured higher quality factor and lower frequency temperature dependence than the quartz.
  • Keywords
    gallium compounds; piezoelectric transducers; vibrations; GaPO4; beam orientation; bias stability; electromechanical coupling coefficients; frequency 110 kHz; frequency stability; frequency temperature dependence; gallium orthophosphate; quality factor; quartz homeotype piezoelectric single crystal; temperature stability; vibrating beam accelerometer; vibrating beams; vibrating inertial sensors; Accelerometers; Acoustic beams; Etching; Frequency; Insulation; Q factor; Stability; Temperature dependence; Temperature sensors; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2009 IEEE
  • Conference_Location
    Christchurch
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-4548-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2009.5398435
  • Filename
    5398435