DocumentCode
3284836
Title
GaPO4 : an interesting crystal for vibrating inertial sensors
Author
Le Traon, Olivier ; Ducloux, O. ; Levy, R. ; Masson, S.
Author_Institution
Physic Dept., ONERA, Chatillon, France
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
1819
Lastpage
1823
Abstract
New experimental results on Gallium Orthophosphate (GaPO4) vibrating beams are presented: a quality factor (Q) of 700 000 has been measured for a one millimeter width beam at about 10 kHz, as well as Q of 130 000 for a 150 ¿m beam width at 110 kHz. At this frequency range, such high quality factors are obtained for the first time on GaPO4 flexure mode beams. Frequency temperature dependence of 10 to 20 ppm/K has been also measured, depending on the beam orientation, in accordance with the theoretical predictions. The GaPO4 is a quartz homeotype piezoelectric single crystal, well-known for its temperature stability (up to 970°C) and its higher electromechanical coupling coefficients than the quartz. These new results confirm the potentiality of GaPO4 in the field of vibrating inertial sensors: for Vibrating Beam Accelerometer (VBA) an improvement of the bias stability -i.e frequency stability - by a factor 10 is expected on the basis of the measured higher quality factor and lower frequency temperature dependence than the quartz.
Keywords
gallium compounds; piezoelectric transducers; vibrations; GaPO4; beam orientation; bias stability; electromechanical coupling coefficients; frequency 110 kHz; frequency stability; frequency temperature dependence; gallium orthophosphate; quality factor; quartz homeotype piezoelectric single crystal; temperature stability; vibrating beam accelerometer; vibrating beams; vibrating inertial sensors; Accelerometers; Acoustic beams; Etching; Frequency; Insulation; Q factor; Stability; Temperature dependence; Temperature sensors; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398435
Filename
5398435
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