Characteristics of Capacitive Membrane-Type RF MEMS Switches

Author

Lai, Yeong-Lin ; Chen, Yueh-Hung

Author_Institution

Dept. of Mechatronics Eng., National Changhua Univ. of Educ.

fYear

2005

fDate

7-9 Dec. 2005

Firstpage

326

Lastpage

327

Abstract

In this paper, analysis of characteristics of capacitive membrane-type RF MEMS switches, have been developed on the basis of the finite element method. Both the static and modal analyses of the switches are conducted. The characteristics including the displacement, stress, effective stiffness constant, natural frequency, and switching time are studied. The structures of the switches are critical for determination of switch performance. How the characteristics of the capacitive membrane-type RF MEMS switches are affected by the structures of the switches is investigated comprehensively

Keywords

finite element analysis; microswitches; RF MEMS switches; capacitive membrane-type switches; displacement characteristic; effective stiffness constant; finite element method; modal analysis; natural frequency; static analysis; stress characteristic; switch performance; switching time; Communication switching; Finite element methods; Mechanical systems; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Stress; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Device Research Symposium, 2005 International

Conference_Location

Bethesda, MD

Print_ISBN

1-4244-0083-X

Type

conf

DOI

10.1109/ISDRS.2005.1596118

Filename

1596118