Title :
Characteristics of Capacitive Membrane-Type RF MEMS Switches
Author :
Lai, Yeong-Lin ; Chen, Yueh-Hung
Author_Institution :
Dept. of Mechatronics Eng., National Changhua Univ. of Educ.
Abstract :
In this paper, analysis of characteristics of capacitive membrane-type RF MEMS switches, have been developed on the basis of the finite element method. Both the static and modal analyses of the switches are conducted. The characteristics including the displacement, stress, effective stiffness constant, natural frequency, and switching time are studied. The structures of the switches are critical for determination of switch performance. How the characteristics of the capacitive membrane-type RF MEMS switches are affected by the structures of the switches is investigated comprehensively
Keywords :
finite element analysis; microswitches; RF MEMS switches; capacitive membrane-type switches; displacement characteristic; effective stiffness constant; finite element method; modal analysis; natural frequency; static analysis; stress characteristic; switch performance; switching time; Communication switching; Finite element methods; Mechanical systems; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Stress; Switches; Voltage;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Conference_Location :
Bethesda, MD
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596118
