DocumentCode :
3284919
Title :
Implementation and characterization of a quality-factor-controllable micromachined inductor
Author :
Huang, Yu-Che ; Jang, Ben-Hwa ; Fang, Weileun
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2011
fDate :
20-23 Feb. 2011
Firstpage :
1168
Lastpage :
1171
Abstract :
This study demonstrates a novel tunable quality factor, self-assembly inductor and packaging using an alternating magnetic flux. The merit of the design is to tilt the inductor from the lossy substrate and localize welding for assembly simultaneously using the magnetic film. A localized induction heating approach by an embedded heater was presented to prevent thermal problems during bonding. To demonstrate the feasibility of the proposed concept, the 8-turn of meander strip inductor was fabricated using MEMS technology. The radio frequency (RF) performance of the inductor at various tilting angles away from the substrate (0° and 90°) was characterized by using a two-port vector network analyzer. Typical measurement results indicate that the inductor is bonded with a good strength (403 g) and the quality factor (Q) can be controlled within 2.9 ~ 5.2 by assembly.
Keywords :
Q-factor; assembling; electronics packaging; inductors; micromachining; strips; welding; MEMS technology; bonding; embedded heater; localized induction heating; lossy substrate; magnetic film; magnetic flux; meander strip inductor; packaging; quality factor-controllable micromachined inductor; radio frequency performance; self-assembly inductor; thermal problem; tunable quality factor; two-port vector network analyzer; welding; Assembly; Bonding; Electromagnetic heating; Inductors; Q factor; Substrates; Welding; RF-MEMS Inductor; localize welding; self-assembly;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
Type :
conf
DOI :
10.1109/NEMS.2011.6017564
Filename :
6017564
Link To Document :
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