Realization and characterization of nano electromechanical devices based on ZnO nanowires

Realization techniques for integrating zinc oxide (ZnO) nanowire into micro electromechanical structures to form nano devices at low temperature are reviewed. Two main strategies are focused on: one is based on controllable dielectrophoretic assembly, and another is using electric-field assisted wet chemical growth. Functional properties of the fabricated devices including electrical contacts, photosensitivity, thermoelectricity, and piezoelectricity are summarized to demonstrate their application prospects.