Realization and characterization of nano electromechanical devices based on ZnO nanowires

Author

Zhu, Rong

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

1176

Lastpage

1179

Abstract

Realization techniques for integrating zinc oxide (ZnO) nanowire into micro electromechanical structures to form nano devices at low temperature are reviewed. Two main strategies are focused on: one is based on controllable dielectrophoretic assembly, and another is using electric-field assisted wet chemical growth. Functional properties of the fabricated devices including electrical contacts, photosensitivity, thermoelectricity, and piezoelectricity are summarized to demonstrate their application prospects.

Keywords

electrophoresis; nanoelectromechanical devices; nanowires; zinc compounds; ZnO; ZnO nanowires; controllable dielectrophoretic assembly; electric-field assisted wet chemical growth; electrical contacts; electromechanical structures; functional properties; nano devices; nano electromechanical devices; photosensitivity; piezoelectricity; thermoelectricity; zinc oxide nanowire; Assembly; Electric fields; Electrodes; Nanoscale devices; Nanowires; Substrates; Zinc oxide; ZnO nanowire; low temperature; nano electromechanical device;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017566

Filename

6017566