Title :
Characterization of compositional oscillations in InGaAs films induced by MBE cell configuration and substrate rotation
Author :
Sarney, W.L. ; Svensson, S.P.
Keywords :
Fluctuations; Indium gallium arsenide; Indium phosphide; Molecular beam epitaxial growth; Semiconductor films; Semiconductor superlattices; Shape; Substrates; Temperature; Transmission electron microscopy;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596125