Numerical approach for the modeling of MEMS structures including accelerated motion effects

An accurate knowledge of the electromagnetic field evolution around a moving or rotating body is very important for the realization of new optical devices and microwave devices, such as the RF-MEMS structures used in phase-shifters, couplers or filters. A novel time-domain modeling technique for the modeling of the transient effect of MEMS structures with accelerated motion is proposed. This technique is a combination of the FDTD method and the body fitted grid generation technique. The key point of this approach is the enhancement of a space and a time transformation factor that leads to the development of a time-invariant numerical grid. The numerical results of the relation between the capacitance and the velocity of motions are shown for a MEMS capacitor and demonstrate its unique computational advantages in the modeling of microwave devices and/or optical devices with moving boundaries.