A high precision displacement sensor based on dual-gratings interference

Author

He, Zhang-Hong ; Liu, Xiao-Jun

Author_Institution

State Key Lab. of Digital Manuf. Equip. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China

fYear

2011

fDate

15-17 April 2011

Firstpage

997

Lastpage

1000

Abstract

A novel displacement sensor with large range and high resolution and simple structure is introduced. The sensor is based on grating diffraction and interference principle. When a laser beam passes through two parallel diffraction gratings, diffraction and interference will happen and interference fringes will be generated, and fringe movement is corresponding to relative grating movement. As a result, displacement measurement can be realized by the fringe collection and analysis. An experimental configuration is built for testing, 10mm range with 10nm resolution are achieved.

Keywords

diffraction gratings; displacement measurement; light interference; measurement by laser beam; displacement measurement; displacement sensor; dual gratings interference; interference fringes; laser beam; parallel diffraction gratings; Diffraction; Diffraction gratings; Displacement measurement; Gratings; Laser beams; Measurement by laser beam; Diffraction grating; Displacement sensor; Interference; Measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electric Information and Control Engineering (ICEICE), 2011 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-8036-4

Type

conf

DOI

10.1109/ICEICE.2011.5777863

Filename

5777863